Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Reexamination Certificate
2006-10-10
2006-10-10
Letscher, Geraldine (Department: 1752)
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Radiation sensitive composition or product or process of making
C430S325000, C430S326000, C430S907000
Reexamination Certificate
active
07118847
ABSTRACT:
Disclosed are spirocyclic olefin polymers, methods of preparing spirocyclic olefin polymers, photresist compositions including spirocyclic olefin resin binders and methods of forming relief images using such photoresist compositions.
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Barclay George G.
Szmanda Charles R.
Trefonas, III Peter
Yueh Wang
Cairns S. Matthew
Letscher Geraldine
Shipley Company LLC
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