Photocopying – Projection printing and copying cameras – Focus or magnification control
Reexamination Certificate
2006-10-24
2006-10-24
Kim, Peter B. (Department: 2851)
Photocopying
Projection printing and copying cameras
Focus or magnification control
C355S053000
Reexamination Certificate
active
07126671
ABSTRACT:
In a projection system for EUV, the positions of mirrors are measured and controlled relative to each other, rather than to a reference frame. Relative position measurements may be made by interferometers or capacitive sensors mounted on rigid extensions of the mirrors.
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Cox Henrikus Herman Marie
Franken Dominicus Jacobus Petrus Adrianus
Kemper Nicolaas Rudolf
Van Den Wildenberg Lambertus Adrianus
Van Der Pasch Engelbertus Antonius Fransiscus
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