Lithographic apparatus and device manufacturing method

Photocopying – Projection printing and copying cameras – Focus or magnification control

Reexamination Certificate

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Details

C355S053000

Reexamination Certificate

active

07126671

ABSTRACT:
In a projection system for EUV, the positions of mirrors are measured and controlled relative to each other, rather than to a reference frame. Relative position measurements may be made by interferometers or capacitive sensors mounted on rigid extensions of the mirrors.

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