Displacement sensor

Optics: measuring and testing – Shape or surface configuration – By focus detection

Reexamination Certificate

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Details

C356S624000

Reexamination Certificate

active

06995849

ABSTRACT:
A displacement sensor is provided with: a light-projection unit; a light-receiving unit having a light-shielding mask and a light-receiving element; a first light-converging element which converges luminous fluxes released from the light-projection unit on a measuring object; a second light-converging element which converges reflected luminous fluxes on the light-receiving unit; a first light-path control element which allows a projection-light light axis and a receiving-light light axis to be coaxially set on the measuring object side; and a light-path length sweeping mechanism which continuously changes a light-path length from the light-projection unit to the measuring object and a light-path length from the measuring object to the light-receiving unit.

REFERENCES:
patent: 3715165 (1973-02-01), Smith
patent: 3847485 (1974-11-01), Zanoni
patent: 4017188 (1977-04-01), Sawatari
patent: 4079248 (1978-03-01), Lehureau et al.
patent: 4730927 (1988-03-01), Ototake et al.
patent: 5216235 (1993-06-01), Lin
patent: 5991040 (1999-11-01), Doemens et al.
patent: 7-113617 (1995-05-01), None
patent: 10-512054 (1998-11-01), None

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