Electron beam system and electron beam measuring and...

Details Electron beam system and electron beam measuring and... Electron beam system and electron beam measuring and...

2006-06-27

2006-06-27

Wells, Nikita (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Methods

C250S310000

Reexamination Certificate

active

07067808

ABSTRACT:
This invention provides an electron beam measuring device capable of performing three-dimensional image measurement of a sample with high precision, irrespective of the tilt angle and height of the sample, by adjusting an electron optical system of a scanning charged-particle beam device so as to be suitable for image measurement. The electron beam measuring device includes a measuring section20adapted to tilt a reference template held by a sample holder3and an irradiated electron beam7relative to each other by means of a sample tilting section5, to find the shape or coordinate values of the reference template based on a stereo image photographed by an electron beam detecting section4, a calibration data preparing section30for comparing the measuring results at the measuring section20with known reference data to prepare calibration data for a stereo image photographed by the electron beam measuring device, and a calibration section40for performing a calibration based on the calibration data so as to reduce aberration in an image of the sample detected by the electron beam detecting section4. Based on the stereo image calibrated by the calibration section40, the shape or coordinate values of the sample9are found.

REFERENCES:
patent: 2004/0264764 (2004-12-01), Kochi et al.
patent: 2005/0061972 (2005-03-01), Kochi et al.
patent: 2005/0133718 (2005-06-01), Miyamoto et al.
patent: 2002-270126 (2002-09-01), None
patent: 2002-270127 (2002-09-01), None
K. Ebihara, “Medical and Biological Electron Microscope Observation Method,” Japanese Society of Electron Microscopy, Jan. 20, 1982 (4thedition: Aug. 20, 1988), pp. 278-299.

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