Scanning probe microscope and specimen observation method

Details Scanning probe microscope and specimen observation method Scanning probe microscope and specimen observation method

2006-06-27

2006-06-27

Wells, Nikita (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

C250S307000, C250S310000, C073S105000

Reexamination Certificate

active

07067806

ABSTRACT:
In order to provide a scanning probe microscope capable of measuring with high throughput distribution information relating to local characteristics of a sample concurrently with accurate three-dimensional shape information of the sample without damaging the sample, the speed of approach to each measurement location is increased by controlling the approach of the sample and probe by the provision of a high-sensitivity proximity sensor of the optical type. Also, additional information relating to the distribution of material quality on the sample can be obtained without lowering the scanning speed by: applying a voltage to the probe, or measuring the response on vibrating the probe, or detecting the local optical intensity of the sample surface concurrently with obtaining sample height data and concurrently with the contact period with the sample, whilst ensuring that the probe is not dragged over the sample, by bringing the probe into contact with the sample intermittently.

REFERENCES:
patent: 5672816 (1997-09-01), Park et al.
patent: 6583411 (2003-06-01), Altmann et al.
patent: 6877365 (2005-04-01), Watanabe et al.

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