Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Reexamination Certificate
2006-02-14
2006-02-14
Versteeg, Steven (Department: 1753)
Chemistry: electrical and wave energy
Processes and products
Coating, forming or etching by sputtering
C204S192120, C427S062000, C427S402000, C427S419300
Reexamination Certificate
active
06998028
ABSTRACT:
A method for producing a superconducting conductor is disclosed, including providing a substrate, depositing a buffer film having a biaxial texture to overlie the substrate by reactive sputtering, and depositing a superconducting layer to overlie the buffer film. Deposition of the buffer film is carried out by exposing the substrate along a deposition zone to a material plume generated by bombarding a target in the presence of a magnetic field, the deposition zone having a length of at least 1.0 m. The assist ions may be generated from a gridless ion source. The buffer film may have a biaxial texture having an out-of-plane crystallographic texture represented by a mosaic spread of not greater than 30°.
REFERENCES:
patent: 5196399 (1993-03-01), Shiota et al.
Vossen et al., “Thin Film Processes”, p. 48-49 (1978).
S. Gnanarajan, et al., “YBCO/YSZ/HASTELLOY Superconducting Tapes by IBAD Magnetron Deposition”, The American Ceramic Society, vol. 140, pp. 211-218, 2002.
A. Malozemoff, et al., “Scale-Up of Second Generation HTS Wire (2G-YBCO Coated Conductor)”, American Superconductor Corporation, DOE Peer Review, Jul. 2004, pp. 1-62.
Superpower, Inc.
Toler Larson & Abel, LLP
Versteeg Steven
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