Semiconductor device using MEMS switch

Details Semiconductor device using MEMS switch Semiconductor device using MEMS switch

2006-05-16

2006-05-16

Cao, Phat X. (Department: 2814)

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Having insulated electrode

C257S299000

Reexamination Certificate

active

07045843

ABSTRACT:
Disclosed herein is a latchable MEMS switch device capable of retaining its ON or OFF state even after the external power source is turned off. It is unnecessary not only to introduce novel materials such as magnetic material but also to form complicated structures. At least one of the cantilever and pull-down electrode of a cold switch is connected to a second MEMS switch. A capacitor between the cantilever and pull-down electrode of the cold switch is charged by the second MEMS switch. Thereafter since the cold switch is isolated in the device, the charge remains stored. Therefore, the cold switch can remain in the ON state since the charge continues to create electrostatic attraction between the cantilever and the pull-down electrode.

REFERENCES:
patent: 5774414 (1998-06-01), Melzner et al.
patent: 6124650 (2000-09-01), Bishop et al.
patent: 6625047 (2003-09-01), Coleman, Jr.
patent: 9-63293 (1996-08-01), None
patent: 2001-176369 (2000-10-01), None

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