Sample preparation for transmission electron microscopy

Details Sample preparation for transmission electron microscopy Sample preparation for transmission electron microscopy

2006-02-21

2006-02-21

Wells, Nikita (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

C250S306000, C250S307000, C250S492100, C250S492200, C250S492210

Reexamination Certificate

active

07002152

ABSTRACT:
TEM FIB samples of a solid state material are subsequently thinned through a subsequent treatment step free of contamination and free of destruction to extremely thin thicknesses through the alternate-sided bombardment of the sample surfaces with an ion beam, with which high-resolution observation and analysis of the sample material with a TEM becomes possible.

REFERENCES:
patent: 5986264 (1999-11-01), Grunewald
patent: 6039000 (2000-03-01), Libby et al.
patent: 6768110 (2004-07-01), Alani

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