Methods and systems for processing a bevel edge of a...

Details Methods and systems for processing a bevel edge of a... Methods and systems for processing a bevel edge of a...

2006-02-21

2006-02-21

Perrin, Joseph L. (Department: 1746)

Cleaning and liquid contact with solids

Apparatus

With plural means for supplying or applying different fluids...

C134S153000, C134S902000

Reexamination Certificate

active

07000622

ABSTRACT:
A system and method for processing an edge of a substrate includes an edge roller and a first proximity head. The first proximity head being mounted on the edge roller. The first proximity head capable of forming a meniscus and including a concave portion and multiple ports opening into the concave portion. The concave portion being capable of receiving an edge of a substrate and the ports including at least one process liquid injection port, at least one vacuum port and at least one surface tension control port.

REFERENCES:
patent: 4838289 (1989-06-01), Kottman et al.
patent: 4968375 (1990-11-01), Sato et al.
patent: 5271774 (1993-12-01), Leenaars et al.
patent: 5660642 (1997-08-01), Britten
patent: 5705223 (1998-01-01), Bunkofske
patent: 5807522 (1998-09-01), Brown et al.
patent: 5861066 (1999-01-01), Moinpour et al.
patent: 5882433 (1999-03-01), Ueno
patent: 5945351 (1999-08-01), Mathuni
patent: 5975098 (1999-11-01), Yoshitani et al.
patent: 5989478 (1999-11-01), Ouellette et al.
patent: 5997653 (1999-12-01), Yamasaka
patent: 6398975 (2002-06-01), Mertens et al.
patent: 6491764 (2002-12-01), Mertens et al.
patent: 6523553 (2003-02-01), Redeker et al.
patent: 6575177 (2003-06-01), Brown et al.
patent: 6797074 (2004-09-01), Redeker et al.
patent: 2002/0121290 (2002-09-01), Tang et al.
patent: 2002/0125212 (2002-09-01), Mertens et al.
patent: 0 905 746 (1999-03-01), None
patent: 02280330 (1990-11-01), None
patent: 02309638 (1990-12-01), None
patent: 11350169 (1999-12-01), None
patent: WO 99/16109 (1999-04-01), None
patent: WO 02/01613 (2002-01-01), None
patent: WO 02/32825 (2002-04-01), None
patent: WO 02/101795 (2002-12-01), None
J.A. Britten, “A moving-zone Marangoni drying process for critical cleaning and wet processing,” Oct. 1997,Solid State Technology.

Affiliated with

Also associated with

Rating

Methods and systems for processing a bevel edge of a... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Methods and systems for processing a bevel edge of a..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Methods and systems for processing a bevel edge of a... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3630940