Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making named article
Reexamination Certificate
2006-02-28
2006-02-28
McPherson, John A. (Department: 1756)
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Making named article
C430S321000, C264S002500
Reexamination Certificate
active
07005243
ABSTRACT:
A method for producing a light guide plate mold (2) with V-shaped grooves (27) includes the steps of: providing a mold substrate (20); applying a first photoresist (22) onto a main surface (21) of the substrate; forming a first pattern on the first photoresist by photolithography with a first patterned mask (24); etching regions of the main surface not covered by the first photoresist, and removing the first photoresist thereby providing the substrate having substantially U-shaped grooves (26) thereon; applying a second photoresist (32) onto the modified main surface; forming a second pattern on the second photoresist by photolithography with a second patterned mask (34), the second patterned mask having smaller transmissive regions (342) compared to those (242) of the first patterned mask; etching regions of the modified main surface not covered by the second photoresist, and removing the second photoresist, thereby providing the substrate having the V-shaped grooves thereon.
REFERENCES:
patent: 6432328 (2002-08-01), Hamanaka et al.
patent: 2003/0020189 (2003-01-01), Chen et al.
patent: 2003/0086030 (2003-05-01), Taniguchi et al.
patent: 7-153122 (1995-06-01), None
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