Semiconductor device and manufacturing method of the same

Details Semiconductor device and manufacturing method of the same Semiconductor device and manufacturing method of the same

2006-10-03

2006-10-03

Kang, Donghee (Department: 2811)

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

On insulating substrate or layer

C438S149000, C438S150000, C438S151000, C438S152000, C438S162000

Reexamination Certificate

active

07115453

ABSTRACT:
Provided is a technique of effectively removing a metallic element that has catalytic action in terms of the crystallization of a semiconductor film and remains in a semiconductor film obtained using the metallic element. With the technique of the present invention, to remove a catalytic element used to crystallize a semiconductor film having an amorphous structure, gettering is completed by forming a region or a semiconductor film, to which a rare gas element is added, and by having the catalytic element move to the formed region or semiconductor film.

REFERENCES:
patent: 3535775 (1970-10-01), Garfinkel et al.
patent: 4371403 (1983-02-01), Ikubo et al.
patent: 4477308 (1984-10-01), Gibson et al.
patent: 4534820 (1985-08-01), Mori et al.
patent: 4727044 (1988-02-01), Yamazaki
patent: 5244819 (1993-09-01), Yue
patent: 5248630 (1993-09-01), Serikawa et al.
patent: 5275896 (1994-01-01), Garofalo
patent: 5403772 (1995-04-01), Zhang et al.
patent: 5426064 (1995-06-01), Zhang et al.
patent: 5481121 (1996-01-01), Zhang et al.
patent: 5488000 (1996-01-01), Zhang et al.
patent: 5492843 (1996-02-01), Adachi et al.
patent: 5501989 (1996-03-01), Takayama et al.
patent: 5508533 (1996-04-01), Takemura
patent: 5529937 (1996-06-01), Zhang et al.
patent: 5534716 (1996-07-01), Takemura
patent: 5543352 (1996-08-01), Ohtani et al.
patent: 5550070 (1996-08-01), Funai et al.
patent: 5551984 (1996-09-01), Tanahashi
patent: 5563426 (1996-10-01), Zhang et al.
patent: 5569610 (1996-10-01), Zhang et al.
patent: 5569936 (1996-10-01), Zhang et al.
patent: 5580792 (1996-12-01), Zhang et al.
patent: 5585291 (1996-12-01), Ohtani et al.
patent: 5589694 (1996-12-01), Takayama et al.
patent: 5595923 (1997-01-01), Zhang et al.
patent: 5595944 (1997-01-01), Zhang et al.
patent: 5604360 (1997-02-01), Zhang et al.
patent: 5605846 (1997-02-01), Ohtani et al.
patent: 5606179 (1997-02-01), Yamazaki et al.
patent: 5608232 (1997-03-01), Yamazaki et al.
patent: 5612250 (1997-03-01), Ohtani et al.
patent: 5614426 (1997-03-01), Funada et al.
patent: 5614733 (1997-03-01), Zhang et al.
patent: 5616506 (1997-04-01), Takemura
patent: 5620910 (1997-04-01), Teramoto
patent: 5621224 (1997-04-01), Yamazaki et al.
patent: 5624851 (1997-04-01), Takayama et al.
patent: 5637515 (1997-06-01), Takemura
patent: 5639698 (1997-06-01), Yamazaki et al.
patent: 5643826 (1997-07-01), Ohtani et al.
patent: 5646424 (1997-07-01), Zhang et al.
patent: 5654203 (1997-08-01), Ohtani et al.
patent: 5656825 (1997-08-01), Kusumoto et al.
patent: 5663077 (1997-09-01), Adachi et al.
patent: 5677549 (1997-10-01), Takayama et al.
patent: 5696003 (1997-12-01), Makita et al.
patent: 5696386 (1997-12-01), Yamazaki
patent: 5696388 (1997-12-01), Funada et al.
patent: 5700333 (1997-12-01), Yamazaki et al.
patent: 5705829 (1998-01-01), Miyanaga et al.
patent: 5712191 (1998-01-01), Nakajima et al.
patent: 5744824 (1998-04-01), Kousai et al.
patent: 5773327 (1998-06-01), Yamazaki et al.
patent: 5789284 (1998-08-01), Yamazaki et al.
patent: 5814540 (1998-09-01), Takemura et al.
patent: 5843225 (1998-12-01), Takayama et al.
patent: 5851860 (1998-12-01), Makita et al.
patent: 5869363 (1999-02-01), Yamazaki et al.
patent: 5888858 (1999-03-01), Yamazaki et al.
patent: 5893730 (1999-04-01), Yamazaki et al.
patent: 5897347 (1999-04-01), Yamazaki et al.
patent: 5915174 (1999-06-01), Yamazaki et al.
patent: 5923962 (1999-07-01), Ohtani et al.
patent: 5932893 (1999-08-01), Miyanaga et al.
patent: 5949115 (1999-09-01), Yamazaki et al.
patent: 5956579 (1999-09-01), Yamazaki et al.
patent: 5960252 (1999-09-01), Matsuki et al.
patent: 5961743 (1999-10-01), Yamazaki et al.
patent: 5970327 (1999-10-01), Makita et al.
patent: 5977559 (1999-11-01), Zhang et al.
patent: 5985740 (1999-11-01), Yamazaki et al.
patent: 5997286 (1999-12-01), Hemsath et al.
patent: 5998838 (1999-12-01), Tanabe et al.
patent: 6013544 (2000-01-01), Makita et al.
patent: 6015593 (2000-01-01), Yonkoski et al.
patent: 6022458 (2000-02-01), Ichikawa
patent: 6027987 (2000-02-01), Yamazaki et al.
patent: 6048758 (2000-04-01), Yamazaki et al.
patent: 6063654 (2000-05-01), Ohtani
patent: 6066518 (2000-05-01), Yamazaki
patent: 6071764 (2000-06-01), Zhang et al.
patent: 6071766 (2000-06-01), Yamazaki et al.
patent: 6072193 (2000-06-01), Ohnuma et al.
patent: 6077731 (2000-06-01), Yamazaki et al.
patent: 6077758 (2000-06-01), Zhang et al.
patent: 6083324 (2000-07-01), Henley et al.
patent: 6084247 (2000-07-01), Yamazaki et al.
patent: 6087679 (2000-07-01), Yamazaki et al.
patent: 6093934 (2000-07-01), Yamazaki et al.
patent: 6100562 (2000-08-01), Yamazaki et al.
patent: 6111557 (2000-08-01), Koyama et al.
patent: 6121660 (2000-09-01), Yamazaki et al.
patent: 6133073 (2000-10-01), Yamazaki et al.
patent: 6133075 (2000-10-01), Yamazaki et al.
patent: 6133119 (2000-10-01), Yamazaki
patent: 6153445 (2000-11-01), Yamazaki et al.
patent: 6156590 (2000-12-01), Yamazaki et al.
patent: 6156628 (2000-12-01), Ohnuma et al.
patent: 6160268 (2000-12-01), Yamazaki
patent: 6162667 (2000-12-01), Funai et al.
patent: 6162704 (2000-12-01), Yamazaki et al.
patent: 6165824 (2000-12-01), Takano et al.
patent: 6168980 (2001-01-01), Yamazaki et al.
patent: 6168981 (2001-01-01), Battaglia et al.
patent: 6180439 (2001-01-01), Yamazaki et al.
patent: 6184559 (2001-02-01), Hayakawa et al.
patent: 6194255 (2001-02-01), Hiroki et al.
patent: 6197624 (2001-03-01), Yamazaki
patent: 6201585 (2001-03-01), Takano et al.
patent: 6204101 (2001-03-01), Yamazaki et al.
patent: 6204154 (2001-03-01), Zhang et al.
patent: 6207969 (2001-03-01), Yamazaki
patent: 6218219 (2001-04-01), Yamazaki et al.
patent: 6225152 (2001-05-01), Yamazaki et al.
patent: 6232205 (2001-05-01), Ohtani
patent: 6232621 (2001-05-01), Yamazaki et al.
patent: 6242290 (2001-06-01), Nakajima et al.
patent: 6251712 (2001-06-01), Tanaka et al.
patent: 6255195 (2001-07-01), Linn et al.
patent: 6285042 (2001-09-01), Ohtani et al.
patent: 6287900 (2001-09-01), Yamazaki et al.
patent: 6287988 (2001-09-01), Nagamine et al.
patent: 6291275 (2001-09-01), Yamazaki et al.
patent: 6294441 (2001-09-01), Yamazaki
patent: 6300659 (2001-10-01), Zhang et al.
patent: 6303415 (2001-10-01), Yamazaki
patent: 6303963 (2001-10-01), Ohtani et al.
patent: 6306694 (2001-10-01), Yamazaki et al.
patent: 6307214 (2001-10-01), Ohtani et al.
patent: 6316789 (2001-11-01), Yamazaki et al.
patent: 6316810 (2001-11-01), Yamazaki et al.
patent: 6331457 (2001-12-01), Yamazaki et al.
patent: 6337259 (2002-01-01), Ueda et al.
patent: 6346730 (2002-02-01), Kitakado et al.
patent: 6362507 (2002-03-01), Ogawa et al.
patent: 6376336 (2002-04-01), Buynoski
patent: 6391690 (2002-05-01), Miyasaka
patent: 6396147 (2002-05-01), Adachi et al.
patent: 6399454 (2002-06-01), Yamazaki
patent: 6399988 (2002-06-01), Yamazaki
patent: 6420758 (2002-07-01), Nakajima
patent: 6426276 (2002-07-01), Ohnuma et al.
patent: 6429097 (2002-08-01), Voutsas et al.
patent: 6436745 (2002-08-01), Gotou et al.
patent: 6461943 (2002-10-01), Yamazaki et al.
patent: 6489189 (2002-12-01), Yamazaki et al.
patent: 6512504 (2003-01-01), Yamauchi et al.
patent: 6531713 (2003-03-01), Yamazaki
patent: 6534826 (2003-03-01), Yamazaki
patent: 6541294 (2003-04-01), Yamazaki et al.
patent: 6576926 (2003-06-01), Yamazaki et al.
patent: 6579736 (2003-06-01), Yamazaki
patent: 6680577 (2004-01-01), Inukai et al.
patent: 6686262 (2004-02-01), Yamazaki et al.
patent: 6709902 (2004-03-01), Kitakado et al.
patent: 6737304 (2004-05-01), Yamazaki et al.
patent: 6743649 (2004-06-01), Yamazaki et al.
patent: 6743700 (2004-06-01), Asami et al.
patent: 6812081 (2004-11-01), Yamazaki et al.
patent: 6821828 (2004-11-01), Ichijo et al.
patent: 2001/0034088 (2001-10-01), Nakamura et al.
patent: 2002/0028543 (2002-03-01), Yamazaki et al.
patent: 2002/0086469 (2002-07-01), Kim et al.
patent: 2002/0102764 (2002-08-01), Yamazaki et al.
patent: 2002/0106861 (2002-08-01), Yamazaki
patent: 2002/0142554 (2002-10-01), Nakajima
patent: 2002/0151120 (2002-10-01), Yamazaki et al.
patent: 2002/0151154 (2002-10-01), Yamazaki et al.
patent: 2002/0164843 (2002-11-01), Yamazaki et al.
patent: 2002/0182783 (20

Affiliated with

Also associated with

Rating

Semiconductor device and manufacturing method of the same does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Semiconductor device and manufacturing method of the same, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Semiconductor device and manufacturing method of the same will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3625596