Optimized temperature controller for cold mass introduction

Details Optimized temperature controller for cold mass introduction Optimized temperature controller for cold mass introduction

2006-08-08

2006-08-08

Ghyka, Alexander (Department: 2812)

Semiconductor device manufacturing: process

With measuring or testing

Electrical characteristic sensed

C219S497000, C219S483000

Reexamination Certificate

active

07087443

ABSTRACT:
A system for minimizing thermal reactor temperature overshoot and stabilization during a boat push. In one embodiment, the setpoint temperatures are reduced to a minimum value. As the temperature in the thermal reactor begins to increase, the setpoint temperatures are ramped back to the original setpoint temperature.

REFERENCES:
patent: 5895596 (1999-04-01), Stoddard et al.
patent: 6207937 (2001-03-01), Stoddard et al.
patent: 6211495 (2001-04-01), Stoddard et al.
patent: 6441350 (2002-08-01), Stoddard et al.
1) Numerical Heat Transfer Simulations of A Vertical Batch Furnance Under Closed-Loop Temperature Control; Semitool, Inc.; Apr. 5, 1997; pp. 110-117.
2) Improving Furnaces With Model-Based Temperature Control; Solid State Technology; Nov. 1996; pp. 119, 120, 122, 126, 128 and 131.

Affiliated with

Also associated with

Rating

Optimized temperature controller for cold mass introduction does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Optimized temperature controller for cold mass introduction, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Optimized temperature controller for cold mass introduction will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3618515