Semiconductor device having impurity region under isolation...

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

Reexamination Certificate

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C257S349000, C257S350000, C257S351000, C257S506000, C257S510000, C257S513000, C257S514000, C438S219000, C438S295000, C438S404000, C438S405000

Reexamination Certificate

active

07053451

ABSTRACT:
In formation of a source/drain region of an NMOS transistor, a gate-directional extension region <41a> of an N+block region <41> in an N+block resist film <51> prevents a well region <11> located under the gate-directional extension region <41a> from implantation of an N-type impurity. A high resistance forming region, which is the well region <11> having a possibility for implantation of an N-type impurity on a longitudinal extension of a gate electrode <9>, can be formed as a high resistance forming region <A2> narrower than a conventional high resistance forming region <A1>. Thus, a semiconductor device having a partially isolated body fixed SOI structure capable of reducing body resistance and a method of manufacturing the same are obtained.

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Hirano, et al., “Bulk-Layout-Compatible 0.18 μm SOI-COS Technology Using Body-Fixed Partial Trench Isolation(PTI)” Proceedings of 1999 IEEE International SOI Conference, Oct. 1999, pp. 131-132.
Maeda, et al., “Analysis of Delay Time Instability According to the Operating Frequency in Field Shield Isolated SOI Circuits” Proceedings of IEEE Transactions of Electron Devices, vol. 45, No. 7, Jul. 1998, pp. 1479-1486.
Widmann, D., et al. “Technologie hochintegrierter Schaltungen.” Springer Verlag (1996), pp. 68-71.

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