Method for making a micro-electro-mechanical gyroscope

Details Method for making a micro-electro-mechanical gyroscope Method for making a micro-electro-mechanical gyroscope

2006-01-10

2006-01-10

Ahmed, Shamim (Department: 1765)

Etching a substrate: processes

Etching of semiconductor material to produce an article...

C216S041000, C216S066000, C073S504010, C310S31300R

Reexamination Certificate

active

06984332

ABSTRACT:
A gyroscope comprises a piezoelectric substrate having a surface. Disposed on the surface are a resonator transducer, a pair of reflectors, a structure such as a metallic dot, and a sensor transducer. The resonator transducer creates a first surface acoustic wave on the surface. The pair of reflectors reflects the first surface acoustic wave to form a standing wave within a region of the surface between the pair of reflectors. The structure is disposed on the surface within the region, wherein a Coriolis force acting upon the structure creates a second surface acoustic wave. The sensor senses the second surface acoustic wave and provides an output indicative thereof.

REFERENCES:
patent: 5653939 (1997-08-01), Hollis et al.
patent: 5725729 (1998-03-01), Greiff
patent: 5731246 (1998-03-01), Bakeman et al.
patent: 5929723 (1999-07-01), Kimura et al.
patent: 8-334330 (1996-12-01), None

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