Method of fabricating multiple nanowires of uniform length...

Etching a substrate: processes – Etching of semiconductor material to produce an article...

Reexamination Certificate

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C216S087000, C216S095000, C216S099000, C216S100000, C117S001000, C117S002000, C117S075000, C117S083000, C117S087000, C977S726000

Reexamination Certificate

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07018549

ABSTRACT:
A method is described for fabricating multiple nanowires of uniform length from a single precursor nucleation particle. The method includes growing a first nanowire segment from a nanoparticle and growing a second nanowire segment between the first nanowire segment and the nanoparticle. The first nanowire segment and the second nanowire segment have a different solubility.

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Yiying Wu et al., Block-by-Block Growth of Single Crystalline Si/SiGe Superlattice Nanowires, Nano Letters, Feb. 2002, vol. 2, No. 2, pp. 83-86.
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Gudiksen et al., Growth of Nanowire Superlattice Structures for Nanoscale Photonics and Electronics, Nature 2001, vol. 415 p 617-620.
Cui, Y., et al., “Diameter-controlled synthesis of single-crystal silicon nanowires,” Applied Physics Letters, Apr. 2001, vol. 78, No. 15, pp. 2214-2216.

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