Method of making a reticle-lens

Details Method of making a reticle-lens Method of making a reticle-lens

1976-09-20

1977-08-16

Bashore, S. Leon

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

65 30R, 65 32, 65 31, 65 60A, 65 60D, 156656, 156665, 156667, C03C 1500, C03C 1700

Patent

active

040424499

ABSTRACT:
A method of producing an optical reticle and the reticle produced thereby. thin layer of aluminum is deposited on the face of a sapphire substrate and a reticle pattern is chemically etched therein. The system is then exposed to air at an elevated temperature for approximately one hour to oxidize the remaining aluminum layer. A film of titanium is next placed over the rough aluminum oxide as by sputtering, for example, and the excess titanium is etched away by the same pattern to produce the finished reticle.

REFERENCES:
patent: 3370948 (1968-02-01), Rosenbauer
patent: 3666642 (1972-05-01), Alwan et al.
patent: 3808069 (1974-04-01), Caffrey et al.
patent: 3857689 (1974-12-01), Koizumi et al.

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