Heat treatment system

Details Heat treatment system Heat treatment system

2006-09-05

2006-09-05

Fuqua, Shawntina (Department: 3742)

Electric heating

Heating devices

Combined with container, enclosure, or support for material...

C219S405000, C219S411000, C392S416000, C392S418000, C118S724000, C118S725000, C118S050100

Reexamination Certificate

active

07102104

ABSTRACT:
The present invention is a thermal processing unit that includes: a tubular processing container; an object-to-be-processed holding unit that holds a plurality of objects to be processed in a tier-like manner and that can be inserted into and taken out from the processing container; a process-gas introducing unit that introduces a predetermined process gas into the processing container; a heating unit provided in the processing container, the heating unit heating the plurality of objects to be processed held by the object-to-be-processed holding unit when the object-to-be-processed holding unit is inserted into the processing container; and a container cooling unit that cools an outside wall surface of the processing container.

REFERENCES:
patent: 6369361 (2002-04-01), Saito et al.
patent: 6414277 (2002-07-01), Nanbu et al.
patent: 2001/0010307 (2001-08-01), Takanori et al.
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patent: 2000-100812 (2000-04-01), None
patent: 2001-006853 (2001-01-01), None
patent: 2001-102314 (2001-04-01), None
patent: 2001-210631 (2001-08-01), None
patent: 2001-210649 (2001-08-01), None
Notification of Transmittal of Copies of Translation of the International Preliminary Examination Report (PCT/IB/338) issued for PCT/JP2002/012280.
International Preliminary Examination Report (PCT/IPEA/409) issued for PCT/JP2002/012280.

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