Chemical mechanical polishing conditioner

Details Chemical mechanical polishing conditioner Chemical mechanical polishing conditioner

1998-09-29

2000-03-07

Rose, Robert A.

Abrading

Abrading process

With tool treating or forming

451 41, 451443, 451444, B24B 5303

Patent

active

060332905

ABSTRACT:
A conditioner head uses a fluid purge system to prevent debris from entering openings in the conditioner head and causing deterioration of bearings and other moving components in the conditioner head. The fluid may be a gas, such as nitrogen, or a liquid, such as water or reactive solvents.

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patent: 5626509 (1997-05-01), Hayashi
patent: 5738574 (1998-04-01), Tolles et al.
patent: 5839947 (1998-11-01), Kimura et al.
patent: 5931725 (1999-08-01), Inaba et al.

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