Fluid sampling apparatus and fluid analyzer having the same

Details Fluid sampling apparatus and fluid analyzer having the same Fluid sampling apparatus and fluid analyzer having the same

2006-09-12

2006-09-12

Gordon, Brian R. (Department: 1743)

Chemical apparatus and process disinfecting, deodorizing, preser

Control element responsive to a sensed operating condition

C422S063000, C422S064000, C422S067000, C422S105000

Reexamination Certificate

active

07105133

ABSTRACT:
A fluid sampling apparatus and associated fluid analyzer sample process fluids used in semiconductor manufacturing at a plurality of measurement points. The fluid sampling apparatus includes a first nozzle assembly having a plurality of outlet nozzles. The plurality of outlet nozzles are connected to lines supplying the process fluids. A second nozzle assembly is installed above the first nozzle assembly and includes an inlet nozzle connected to an apparatus for measuring a contamination level of the process fluids. A motor is connected to the second nozzle assembly to align a selected outlet nozzle with the inlet nozzle. A pneumatic cylinder is coupled to the first nozzle assembly to connect the selected outlet nozzle with the inlet nozzle. In this manner, it is possible to measure the contamination level of process fluids supplied at a plurality of measurement points by using a single measuring apparatus.

REFERENCES:
patent: 3915652 (1975-10-01), Natelson
patent: 4108602 (1978-08-01), Hanson et al.
patent: 5167926 (1992-12-01), Kimura et al.
patent: 5196169 (1993-03-01), Schick et al.
patent: 5416023 (1995-05-01), Binder et al.
patent: 5681531 (1997-10-01), LaPack et al.
patent: 5841022 (1998-11-01), Hase
patent: 5908599 (1999-06-01), Behringer et al.
patent: 6170494 (2001-01-01), Marinaro et al.
patent: 6350617 (2002-02-01), Hindsgaul et al.
patent: 6423536 (2002-07-01), Jovanovich et al.
patent: 6599477 (2003-07-01), Miyake et al.
patent: 6706527 (2004-03-01), Szecsody
patent: 6787111 (2004-09-01), Roach et al.
patent: 6887429 (2005-05-01), Marshall et al.
patent: 6902938 (2005-06-01), Cody
patent: 2001/0005489 (2001-06-01), Roach et al.
patent: 2002/0106804 (2002-08-01), Tanaka
patent: 2002/0131896 (2002-09-01), Hunnell et al.
patent: 2002/0164821 (2002-11-01), Brink et al.
patent: 2003/0053937 (2003-03-01), Akporiaye et al.
patent: 2003/0072679 (2003-04-01), Johnson et al.
patent: 6-094733 (1994-08-01), None
patent: 7-209239 (1995-08-01), None
patent: 9-196828 (1997-07-01), None
patent: 9-318609 (1997-12-01), None

Affiliated with

Also associated with

Rating

Fluid sampling apparatus and fluid analyzer having the same does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Fluid sampling apparatus and fluid analyzer having the same, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Fluid sampling apparatus and fluid analyzer having the same will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3576793