Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Reexamination Certificate
2006-09-12
2006-09-12
Hamilton, Cynthia (Department: 1752)
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Radiation sensitive composition or product or process of making
C430S272100, C430S326000, C430S311000
Reexamination Certificate
active
07105266
ABSTRACT:
The invention includes polymers that contain a heterocyclic ring, preferably an oxygen- or sulfur-containing ring. The heterocyclic ring is preferably fused to the polymer backbone. The invention also provides photoresists that contain such polymers, particularly for imaging at short wavelengths such as sub-200 nm.
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Barclay George G.
Yueh Wang
Corless Peter F.
Edwards Angell Palmer & & Dodge LLP
Frickey Darryl P.
Hamilton Cynthia
Shipley Company L.L.C.
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