Discrete polarization state spectroscopic ellipsometer...

Details Discrete polarization state spectroscopic ellipsometer... Discrete polarization state spectroscopic ellipsometer...

2006-07-11

2006-07-11

Pham, Hoa Q. (Department: 2877)

Optics: measuring and testing

By polarized light examination

Of surface reflection

Reexamination Certificate

active

07075650

ABSTRACT:
A spectroscopic ellipsometer system comprising a plurality of individual sources which are sequentially energized to provide a sequence of beams, each of different polarization state but directed along a common locus toward a sample. The prefered spectroscopic ellipsometer system has no parts which move during data collection, and it provides a progressive plurality of sequentially discrete, rather than continuously varying, polarization states.

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