Method and device for observing a specimen in a field of...

Details Method and device for observing a specimen in a field of... Method and device for observing a specimen in a field of...

2006-03-14

2006-03-14

Nguyen, Thinh (Department: 2861)

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

C250S307000

Reexamination Certificate

active

07012254

ABSTRACT:
The present invention provides a method and device for observing a specimen in a field of view of an electron microscope. The method may include the steps of obtaining an image formed by irradiating an electron beam to a specimen; presetting an arbitrary search target pattern similar to a search target form; determining whether the field of view has a brightness inappropriate for observation or search; adjusting electro-optical conditions of an electron microscope when it is determined that a field of view is appropriate for observation or search; searching the field of view for a form having the same pattern as the search target pattern; and measuring a number of the forms obtained by the search.

REFERENCES:
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patent: 06-215720 (1994-05-01), None
patent: 10-172488 (1998-06-01), None
Kobayashi, K., “Principles of Phase Only Correlation and Its Application”, ITE Technical Report, vol. 20, No. 41, pp. 1-6, MIP 96-53, NIM 96-75 (Jul. 1996).

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