Microstructures comprising a dielectric layer and a thin...

Details Microstructures comprising a dielectric layer and a thin... Microstructures comprising a dielectric layer and a thin...

2006-04-11

2006-04-11

Ho, Tu-Tu (Department: 2818)

Active solid-state devices (e.g., transistors, solid-state diode

Responsive to non-electrical signal

Physical deformation

C257S254000

Reexamination Certificate

active

07026697

ABSTRACT:
Surface micromachined structures having a relatively thick dielectric layer and a relatively thin conductive layer bonded together.

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