Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports
Reexamination Certificate
2006-05-30
2006-05-30
Wells, Nikita (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Analyte supports
Reexamination Certificate
active
07053383
ABSTRACT:
A coupon for preparing a TEM sample holder comprises a sheet of material that includes a TEM sample holder form. There is at least one section of the sheet connecting the TEM sample holder form to other portions of the sheet. A TEM sample holder is formed by cutting the TEM sample holder form from the coupon in a press. The cutting joins the tip point of a nano-manipulator probe tip with the formed TEM sample holder. The tip point of the probe has a sample attached for inspection in a TEM.
REFERENCES:
patent: 5270552 (1993-12-01), Ohnishi et al.
patent: 6080991 (2000-06-01), Tsai
patent: 6300631 (2001-10-01), Shofner
patent: 6523239 (2003-02-01), Peterson et al.
patent: 6664552 (2003-12-01), Shichi et al.
patent: 6714289 (2004-03-01), Haraguchi
patent: 6717156 (2004-04-01), Sugaya et al.
patent: 2002/0000522 (2002-01-01), Alani
patent: 2003/0150836 (2003-08-01), Tsung et al.
patent: 2004/0004186 (2004-01-01), Jiyan et al.
patent: 2004/0016880 (2004-01-01), Reiner et al.
patent: 2004/0178355 (2004-09-01), Rasmussen
Altmann, F., FIB-Pinpointed Preparation of TEM Samples by a Needle Based Manipulator (Lift-Out) Technique, Practical Metallography, 2003, pp. 175-183, vol. 40, No. 4.
Anderson, R. , Comparison of FIB TEM Specimen Preparation Methods, Microscopy and Microanalysis, 2002, p. 44, vol. 8, Suppl. 2.
Bicais-Lepinay, N.; Andre, F.; Pantel, R.; Jullian, S. Margain, A.; Kwakman, L. F. Tz., Lift-out techniques coupled with advanced TEM characterization methods for electrical.
Burkhardt, C., Nisch, W. , In-Situ Lift-Out of TEM—Samples by Micro Manipulation in a Scanning Electron Microscope ,Practical Metallography, 2004, pp. 190-198, vol. 41.
Crawford, E. J.; Gignac, L.; Barth, K.; Petrus, J.; Levine, E. , Focused Ion Beam Sectioning and Lift-out Method for Copper and Resist Vias in Organic Low-k Dielectrics., Mic.
Dai, J. Y.; Tee, S. F.; Tay, C. L.; Song, Z. G.; Ansari, S.; Er, E.; Redkar, S. , Development of a rapid and automated TEM sample preparation method in semiconductor failure a.
Engelmann H.-J., Volkmann, B., Zschech, E. , From SEM Cross-Section to TEM Sample—New Capabilities of FIB Sample Preparation by “Refill” Technique, Practical Metallography.
Gnauck, P.; Hoffrogge, P.; Schumann, M.; Bauhammer, G., Enhanced Site specific Preparation of SEM Cross Sections and TEM Samples by using CrossBeam Technology, Microscopy and.
Kempshall, B.W., Schwarz, S.M., Giannuzzi, L.A. , In-situ FIB lift-out for site specific TEM specimen preparation of grain boundaries and interfaces, ICEM 15, 2002, pp. 249-.
Kempshall, B.W and Giannuzzi, L.A., IN-Situ Lift-Out FIB Specimen Preparation for TEM of Magnetic Materials, Microscopy and Microanalysis, 2002, pp. 390-391, vol. 8, Suppl.
Langford, R.M., Petford-Long, A.K. and Gnauck, P. , Focused Ion Beam Based Sample Preparation Techniques, Microscopy & Microanalysis, 2002, pp. 46-47, vol. 8, Suppl. 2, Lee, J.
Chuang, J.H. , A Novel Application of the FIB Lift-out Technique for 3-D TEM Analysis , Microelectronics Reliability, 2001, pp. 1551-1556 , vol. 41.
Mohammad, K. N.; Sim, K. S., Novel Application of FIB Lift-out and Ultramicrotomy for Advanced Package Failure Analysis , Proceedings of the 9th International Symposium on the.
Subramanian, Swaminathan; Rose, Stewart; Conner, James; Schani, Phil; Moss, Jamey , Specific Area Planar and Cross-Sectional Lift-Out Techniques: Procedures and Novel Applicat.
Ritz, Y., Stegmann, H., Engelmann, H.-J., Zschech, E. , Target Preparation of Samples for 3D-TEM Using Micromanipulator, Practical Metallography, 2004, pp. 180-189, vol. 41.
Shofner, T. L.; Drown, J. L.; Brown, S. R.; Rossie, B. B.; Decker, M. A.; Obeng, Y. S.; Stevie, F. A. , Planar TEM Analysis of Nanoindented Samples Using the Focused Ion Beam.
Stevie, F. A.; Irwin, R.B.; Shofner, T. L; Brown, S.R.; Drown, J. L.; Giannuzzi, L.A., Plan View TEM Sample Preparation Using the Focused Ion Beam Lift-Out Technique, CP449.
Veirman De, A. E. M. , ′3-Dimensional' TEM silicon-device analysis by combining plan-view and FIB sample preparation , Materials Science & Engineering B , 2003 , pp. 63-69 , v.
Gnauck, P.; Zeile, U.; Hoffrogge, P.; Benner, G.; Orchowski, A.; Rau, W-D., Real time SEM imaging FIB of milling processes for extended accuracy on TEM samples for EFTEM analy.
Omniprobe, Inc.
Thomas John A.
Yantomo Jennifer
LandOfFree
Method and apparatus for rapid sample preparation in a... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method and apparatus for rapid sample preparation in a..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and apparatus for rapid sample preparation in a... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3557048