Process parameter event monitoring system and method for...

Details Process parameter event monitoring system and method for... Process parameter event monitoring system and method for...

2006-05-02

2006-05-02

Lebentritt, Michael (Department: 2812)

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Having insulated electrode

C700S121000, C700S109000, C700S108000

Reexamination Certificate

active

07038279

ABSTRACT:
A system and method for measuring process parameters in a process machine is described. The system is synchronized to the operation of the process machine so that spurious process parameters events are filtered out.

REFERENCES:
patent: 6440178 (2002-08-01), Berner et al.
patent: 6647309 (2003-11-01), Bone
patent: 6781205 (2004-08-01), Levit et al.

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