Method for monitoring and improving integrated circuit...

Computer-aided design and analysis of circuits and semiconductor – Nanotechnology related integrated circuit design

Reexamination Certificate

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C716S030000

Reexamination Certificate

active

07020860

ABSTRACT:
Methods for monitoring and improving the fabrication process of integrated circuits using configurable devices are described. In one aspect, the method includes instantiating a test pattern on one or more configurable devices fabricated using the fabrication process, identifying an underperforming region of the configurable devices, and determining if the underperforming region is layout sensitive. At least one of the fabrication process and the layout of the configurable device can then be adjusted based on the determination. In some embodiments, the configurable device may be a programmable logic device, such as a field programmable logic array.

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Li, Xiao-Yu et al.; “An Effective Method of Characterization Poly Gate CD Variation and it's Impact on Product Performance and Yield,” Semiconductor Manufacturing, 2003 IEEE International Symposium, Sep. 2, 2003, pp 259-262, available from IEEE, 3 Park Avenue, 17th Floor, New York, NY 10016-5997.

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