Data processing: measuring – calibrating – or testing – Measurement system in a specific environment – Quality evaluation
Reexamination Certificate
2006-01-10
2006-01-10
Paladini, Albert W. (Department: 2125)
Data processing: measuring, calibrating, or testing
Measurement system in a specific environment
Quality evaluation
C700S108000
Reexamination Certificate
active
06985825
ABSTRACT:
A method includes processing a plurality of workpieces to form at least one feature on each workpiece. A plurality of characteristics of the feature is measured. A covariance matrix including diagonal and non-diagonal terms for the plurality of characteristics measured is constructed. At least the non-diagonal terms of the covariance matrix are monitored. A sampling plan for measuring the workpieces is determined based on the monitoring. A system includes a plurality of tools, at least one metrology tool, and a sampling controller. The tools are configured to process a plurality of workpieces to form at least one feature on each workpiece. The metrology tool is configured to measure a plurality of characteristics of the feature. The sampling controller is configured to construct a covariance matrix including diagonal and non-diagonal terms for the plurality of characteristics measured, monitor at least the non-diagonal terms of the covariance matrix, and determine a sampling plan for measuring the workpieces based on the monitoring.
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Cusson Brian K.
Good Richard P.
Jackson Timothy L.
Advanced Micro Devices , Inc.
Jarrett Ryan
Paladini Albert W.
Williams Morgan & Amerson
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