Push/pull actuator for microstructures

Electricity: magnetically operated switches – magnets – and electr – Magnets and electromagnets – With magneto-mechanical motive device

Reexamination Certificate

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C335S078000, C200S181000

Reexamination Certificate

active

07026899

ABSTRACT:
A relay for switching an electrical signal includes switching elements, an actuator for closing the switch, and an actuator for opening the switch, the latter two of which are mechanically decoupled when the relay is in a mechanical rest position. When a relay close signal is applied, the closing actuator electrostatically drives the switching elements to complete a signal path between two terminals for the switched signal. In the process of closing the switch, the opening actuator remains stationary, i.e., no mass is displaced. Application of a switch open signal electrostatically drives the opening actuator, optionally in combination with a mechanical restoring force on the closing actuator, to open the switch to break the signal conduction path for the switched signal.

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Design of Low Actuation Voltage RF MEMS Switch, 0-7803-5687-X—2000 IEEE.

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