Movable MEMS-based noncontacting device

Details Movable MEMS-based noncontacting device Movable MEMS-based noncontacting device

2006-04-18

2006-04-18

Tamai, Karl Eizo (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Charge accumulating

C359S225100, C385S018000

Reexamination Certificate

active

07030537

ABSTRACT:
A microstructure for steering light that mitigates stiction problems is provided. A first tiltable assembly that includes a reflective coating is connected with a substrate. A second tiltable assembly is also connected with the substrate. First hand second electrodes are connected with the substrate and are configured to tilt the two tiltable assemblies such that they are interdigitated. In various embodiments, the tiltable assemblies are configured as cantilever arrangements and/or torsion-beam arrangements.

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