Probe with hollow waveguide and method for producing the same

Details Probe with hollow waveguide and method for producing the same Probe with hollow waveguide and method for producing the same

Filed on

2006-01-03

Date issued

2006-01-03

Examiner

Porta, David (Department: 2878)

Patent Class

Radiant energy

SubClass

Inspection of solids or liquids by charged particles

SubSubClass

Methods

Other Related Categories

C073S105000, C369S112290

Type

Reexamination Certificate

Status

active

Patent number

06982419

Description

ABSTRACT:
A probe for detecting light or irradiating light comprises a cantilever supported at an end thereof by a substrate, a hollow tip formed at a free end of the cantilever, a microaperture formed at the end of the tip, and a hollow waveguide formed inside the cantilever.A method for producing a probe for light detection or light irradiation which comprises the steps of working a substrate to form a groove therein, forming a flat plate-shaped cover portion on the groove to form a hollow waveguide having an opening in a part thereof, forming a hollow tip having a microaperture on the opeining, and removing a part of the substrate by etching, to form a cantilever.

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