Selectively growing a polymeric material on a semiconductor...

Details Selectively growing a polymeric material on a semiconductor... Selectively growing a polymeric material on a semiconductor...

2006-04-18

2006-04-18

Geyer, Scott (Department: 2812)

Semiconductor device manufacturing: process

Coating of substrate containing semiconductor region or of...

Insulative material deposited upon semiconductive substrate

Reexamination Certificate

active

07030040

ABSTRACT:
A surface may be selectively coated with a polymer using an induced surface grafting or polymerization reaction. The reaction proceeds in those regions that are polymerizable and not in other regions. Thus, a semiconductor structure having organic regions and metal regions exposed, for example, may have the organic polymers formed selectively on the organic regions and not on the unpolymerizable or metal regions.

REFERENCES:
patent: 6670286 (2003-12-01), Yang et al.

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