Optics: measuring and testing – By polarized light examination – Of surface reflection
Reexamination Certificate
2006-01-31
2006-01-31
Lauchman, Layla G. (Department: 2877)
Optics: measuring and testing
By polarized light examination
Of surface reflection
C356S400000, C430S022000
Reexamination Certificate
active
06992764
ABSTRACT:
An alignment target includes periodic patterns on two elements. The periodic patterns are aligned when the two elements are properly aligned. By measuring the two periodic patterns with an incident beam having a single polarization state and detecting the intensity of the resulting polarized light, it can be determined if the two elements are aligned. The same polarization state may be detected as is incident or different polarization states may be used. A reference measurement location may be used that includes a third periodic pattern on the first element and a fourth periodic pattern on the second element, which have a designed in offset, i.e., an offset when there is an offset of a known magnitude when the first and second element are properly aligned. The reference measurement location is similarly measured with a single polarization state.
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Heaton John D.
Lowe-Webb Roger R.
Rabello Silvio J.
Yang Weidong
Lauchman Layla G.
Nanometrics Incorporated
Silicon Valley Patent & Group LLP
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