Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate
2006-09-12
2006-09-12
Nguyen, Kiet T. (Department: 2881)
Radiant energy
Irradiation of objects or material
Irradiation of semiconductor devices
C382S266000, C358S003260, C358S296000
Reexamination Certificate
active
07105844
ABSTRACT:
A method and system for generating flashes on a substrate. The method includes receiving one or more figures of a pattern to be printed on the substrate and decomposing each figure into at least four substantially rectangular shapes. The four substantially rectangular shapes are separated by at least one horizontal boundary and at least one vertical boundary. The method further includes generating a flash for each substantially rectangular shape such that each edge of each figure is an image of the same aperture.
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Applied Materials Inc.
Leybourne James J.
Nguyen Kiet T.
Patterson & Sheridan LLP
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