Polishing using multi-metal oxide nanopowders

Details Polishing using multi-metal oxide nanopowders Polishing using multi-metal oxide nanopowders

Filed on

2006-04-18

Date issued

2006-04-18

Examiner

Deo, Duy-Vu N. (Department: 1765)

Patent Class

Abrasive tool making process, material, or composition

SubClass

With inorganic material

Other Related Categories

C051S308000, C051S309000, C075S343000

Type

Reexamination Certificate

Status

active

Patent number

07029507

Description

ABSTRACT:
Polishing powders of nanoscale dimensions are disclosed. Complex, multi-metal oxides are disclosed as constituents for chemical mechanical planarization, (CMP) as well as polishes for optical components, photonic devices, and other applications.

REFERENCES:
patent: 4851262 (1989-07-01), McFeaters
patent: 5472477 (1995-12-01), Konig
patent: 5851507 (1998-12-01), Pirzada et al.
patent: 5984997 (1999-11-01), Bickmore et al.
patent: 6068787 (2000-05-01), Grumbine et al.
patent: 6719821 (2004-04-01), Yadav et al.

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