Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate
2005-08-09
2005-08-09
Lebentritt, Michael (Department: 2812)
Semiconductor device manufacturing: process
Coating with electrically or thermally conductive material
To form ohmic contact to semiconductive material
C438S264000, C118S719000
Reexamination Certificate
active
06927165
ABSTRACT:
A substrate processing apparatus includes a housing, a process tube for performing variable batch processes on substrates, and product substrate carriers. The product substrate carriers have a capacity of a predetermined number of substrates. A number of the product substrates processed during one batch process are less than or equal to the predetermined number of the substrates. All of the product substrates contained in one product substrate carrier is processed in the process tube at a same time.
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Akutsu Norio
Matsunaga Tatsuhisa
Noto Kouichi
Teramoto Masahiro
Bacon & Thomas
Hitachi Kokusai Electric Inc.
Lebentritt Michael
Lindsay Jr. Walter L.
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