Semiconductor device with transistor and capacitor and its...

Details Semiconductor device with transistor and capacitor and its... Semiconductor device with transistor and capacitor and its...

2005-02-01

2005-02-01

Flynn, Nathan J. (Department: 2826)

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Having insulated electrode

C257S296000, C257S303000, C257S306000, C257S310000, C257S311000, C438S238000, C438S239000, C438S386000, C438S399000

Reexamination Certificate

active

06849894

ABSTRACT:
On a semiconductor substrate, a transistor and a capacitor electrically connected to the transistor are formed, the capacitor having two electrodes made of metal and a capacitor dielectric layer between the two electrodes made of oxide dielectric material. A temporary protective film is formed over the capacitor, the temporary protective film covering the capacitor. The semiconductor substrate with the temporary protective film is subjected to a heat treatment in a reducing atmosphere. The temporary protective film is removed. The semiconductor substrate with the temporary protective film removed is subjected to a heat treatment in an inert gas atmosphere or in a vacuum state. A protective film is formed over the capacitor, the protective film covering the capacitor. With these processes, leak current of the capacitor can be reduced.

REFERENCES:
patent: 6188098 (2001-02-01), Amanuma
patent: 6465370 (2002-10-01), Schrems et al.
patent: 6605835 (2003-08-01), Lee
Wolf, “Silicon Processing for the VLSI Era”, Lattice Press, vol. 2, pp. 434-435.*
Office Action dated Mar. 25, 2004 for the corresponding Taiwan patent application.

Affiliated with

Also associated with

Rating

Semiconductor device with transistor and capacitor and its... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Semiconductor device with transistor and capacitor and its..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Semiconductor device with transistor and capacitor and its... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3512703