Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2005-02-15
2005-02-15
Picard, Leo (Department: 2125)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
C374S005000, C703S002000, C703S013000
Reexamination Certificate
active
06856849
ABSTRACT:
A method is provided, the method comprising measuring at least one parameter characteristic of processing performed on a workpiece in a processing step, and modeling the at least one characteristic parameter measured using a correlation model. The method also comprises applying the correlation model to modify the processing performed in the processing step.
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Campbell William Jarrett
Riley Terrence J.
Advanced Micro Devices , Inc.
Ortiz-Rodriguez Carlos
Picard Leo
Williams Morgan & Amerson P.C.
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