4. Semiconductor device manufacturing: process
  5. Introduction of conductivity modifying dopant into...
  6. Ion implantation of dopant into semiconductor region

Terrence J. Riley

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Lot-to-lot rapid thermal processing (RTP) chamber preheat...

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Ion implantation of dopant into semiconductor region
Reexamination Certificate

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Lot-to-lot rapid thermal processing (RTP) chamber preheat...

Electric resistance heating devices – Heating devices – Radiant heater
Reexamination Certificate

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Method and apparatus for fault detection of a processing...

Error detection/correction and fault detection/recovery – Data processing system error or fault handling – Reliability and availability
Reexamination Certificate

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Method and apparatus for fault model analysis in...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate

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Method and apparatus for using tool state information to...

Data processing: measuring – calibrating – or testing – Measurement system – Performance or efficiency evaluation
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Profile ID: LFUS-PAI-P-2034799

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