Abrading – Machine – Rotary tool
Reexamination Certificate
2005-11-29
2005-11-29
Shakeri, Hadi (Department: 3723)
Abrading
Machine
Rotary tool
C451S287000
Reexamination Certificate
active
06969309
ABSTRACT:
Planarizing machines for chemical-mechanical planarization of microelectronic substrate assemblies are disclosed. The planarizing machines for processing microelectronic substrate assemblies generally include a table, a pad support assembly either positioned on or in the table, and a planarizing medium coupled to the pad support assembly. The pad support assembly includes a fluid container and an elastic membrane coupled to the fluid container. The fluid container generally is a basin that is either a separate component that is attached to the table, or a depression in the table itself. The fluid container can also be a bladder attached to the table. The fluid chamber is filled with support fluid to support the elastic membrane over the fluid chamber.
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Dorsey & Whitney LLP
Shakeri Hadi
LandOfFree
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