Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Reexamination Certificate
2005-02-08
2005-02-08
Hamilton, Cynthia (Department: 1752)
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Radiation sensitive composition or product or process of making
Reexamination Certificate
active
06852468
ABSTRACT:
A positive resist composition comprising: (A) a resin capable of increasing the solubility in an alkali developer by the action of acid, in which the resin contains (A1) a repeating unit having at least one of a dihydroxyadamantyl group and a trihydroxyadamantyl group and (A2) a repeating unit containing an acid-decomposable group having an alicyclic structure; and (B) a compound capable of generating an acid upon irradiation with one of an actinic ray and a radiation, wherein the resin (A) contains the repeating unit (A1) and the repeating unit (A2) at a composition molar ratio: A1/A2 of from 0.15 to 1.0, and a total content of the repeating unit (A1) and the repeating unit (A2) in the resin (A) is 40 to 70 mole %.
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Fuji Photo Film Co. , Ltd.
Hamilton Cynthia
Sughrue & Mion, PLLC
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