Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation
Reexamination Certificate
2005-06-28
2005-06-28
Flynn, Nathan J. (Department: 2826)
Active solid-state devices (e.g., transistors, solid-state diode
Responsive to non-electrical signal
Physical deformation
C257S125000, C257S414000, C257S415000, C438S048000, C438S049000, C438S050000, C333S188000, C333S195000, C333S133000, C310S312000, C310S364000
Reexamination Certificate
active
06911708
ABSTRACT:
Disclosed are a film bulk acoustic resonator, a duplexer filter having the same, and a semiconductor package thereof. The film bulk acoustic resonator comprising: a semiconductor substrate; a lower electrode more than two layers formed at an upper surface of the semiconductor substrate; a piezoelectric layer deposited on an upper surface of the lower electrode with a certain thickness; and an upper electrode more than two layers formed at an upper surface of the piezoelectric layer, has an excellent bonding characteristic. The duplexer filter can microminiaturize a size thereof by integrating a film bulk acoustic filter formed by connecting the plurality of film bulk acoustic resonators serially and in parallel and peripheral passive elements of the film bulk acoustic filter into one semiconductor chip. Also, the semiconductor package is suitable for the duplexer filter.
REFERENCES:
patent: 2002/0070262 (2002-06-01), Bradley et al.
patent: 2002/0123177 (2002-09-01), Ruby et al.
patent: 2003/0011446 (2003-01-01), Bradley
patent: 2003/0128081 (2003-07-01), Ella et al.
patent: 2004/0132487 (2004-07-01), Kearns
Lakin et al., “High Performance Stacked Crystal Filters for GPS and Wide Bandwidth Applications”, IEEE, 2001.
Flynn Nathan J.
LG Electronics Inc.
Wilson Scott R.
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