Micro-mechanical device having anti-stiction layer and...

Details Micro-mechanical device having anti-stiction layer and... Micro-mechanical device having anti-stiction layer and...

2005-06-14

2005-06-14

Dang, Hung Xuan (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S291000, C359S292000, C359S295000, C427S162000

Reexamination Certificate

active

06906845

ABSTRACT:
The micro-mechanical structure includes an anti-stiction layer formed by plasma enhanced chemical vapor deposition and plasma etching. The anti-stiction layer is selectively formed on only the area of a substrate other than the top of a movable structure and a part of an electrode that is subsequently bonded to a wire.

REFERENCES:
patent: 5285196 (1994-02-01), Gale, Jr.
patent: 5512374 (1996-04-01), Wallace et al.
patent: 5616372 (1997-04-01), Conley et al.
patent: 5661592 (1997-08-01), Bornstein et al.
patent: 5694740 (1997-12-01), Martin et al.
patent: 6051503 (2000-04-01), Bhardwaj et al.

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