Micropattern measuring method, micropattern measuring...

Details Micropattern measuring method, micropattern measuring... Micropattern measuring method, micropattern measuring...

2005-11-08

2005-11-08

Nghiem, Michael (Department: 2863)

Data processing: measuring, calibrating, or testing

Measurement system

Orientation or position

Reexamination Certificate

active

06963819

ABSTRACT:
A micropattern measuring method discloses herein includes acquiring an image of a micropattern including plural layers; extracting a rough outline of the micropattern in the image as a sequence of points including plural points; dividing the plural points composing the sequence of points into groups; making each of the groups as each of patterns belong to any of the plural layers; and acquiring edge coordinates of a pattern to be measured from the patterns which are made to belong to the respective layers.

REFERENCES:
patent: 5027417 (1991-06-01), Kitakado et al.
patent: 6480807 (2002-11-01), Miyano
patent: 6772089 (2004-08-01), Ikeda et al.
patent: 2002/0097913 (2002-07-01), Ikeda
patent: 2002/0141647 (2002-10-01), Mitsui
patent: 2003/0059104 (2003-03-01), Mitsui
patent: 2003/0074156 (2003-04-01), Ikeda et al.
patent: 07-027548 (1995-01-01), None
patent: 2001-091231 (2001-04-01), None
patent: 2002-296761 (2002-10-01), None

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