Semiconductor device having multiple substrates

Details Semiconductor device having multiple substrates Semiconductor device having multiple substrates

2005-12-27

2005-12-27

Tran, Minhloan (Department: 2826)

Active solid-state devices (e.g., transistors, solid-state diode

Responsive to non-electrical signal

Physical deformation

C257S415000, C073S493000, C073S514010

Reexamination Certificate

active

06979873

ABSTRACT:
A semiconductor device includes a first substrate including first, second and third layers; and a second substrate including fourth, fifth and sixth layers. The first substrate provides an electric device. The second substrate provides a physical quantity sensor. The first layer of the first substrate and the fourth layer of the second substrate are shields for protecting the electric device and the physical quantity sensor. The device is protected from outside disturbance without adding an additional shield.

REFERENCES:
patent: 6153917 (2000-11-01), Matsunaga et al.
patent: 6167761 (2001-01-01), Hanzawa et al.
patent: 6316840 (2001-11-01), Otani
patent: 2003/0047804 (2003-03-01), Otani
patent: A-2002-50771 (2002-02-01), None

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