Micro-actuation apparatus for head ABS planarity (PTR)...

Details Micro-actuation apparatus for head ABS planarity (PTR)... Micro-actuation apparatus for head ABS planarity (PTR)...

2005-12-27

2005-12-27

Versteeg, Steven (Department: 1753)

Chemistry: electrical and wave energy

Processes and products

Coating, forming or etching by sputtering

C204S192340, C204S298320, C204S298360

Reexamination Certificate

active

06979389

ABSTRACT:
An apparatus and method of machining sliders to obtain the optimum PTR for each slider. An array of MEMS devices configured for angular actuation are provided, and a slider is placed in each MEMS device of the array. The ion milling of the sliders is controlled individually for each slider based on the relationship of the ion angle and relative etch rates of the slider components. The MEMS devices are controlled to ensure the ion incidence angle for each slider is such that the desired PTR of each slider is achieved.

REFERENCES:
patent: 5468177 (1995-11-01), Kindler et al.
patent: 5632669 (1997-05-01), Azarian et al.
patent: 5749769 (1998-05-01), Church et al.
patent: 6175170 (2001-01-01), Kota et al.
patent: 6354438 (2002-03-01), Lee et al.
patent: 6521902 (2003-02-01), Chang et al.
patent: 2002/0035778 (2002-03-01), Hashimoto et al.
Article entitled “Robot Leg Motion in a Planarized-SOI, 2 Poly Process,” by S. Hollar, A. Flynn, S. Bergbreiter, and K.S.I. Pister.
Article entitled “Single Mask, Large Force, and Large Displacement Electrostatic Linear Inchworm Motors,” by R. Yeh, S. Hollar, and K. Pister.

Affiliated with

Also associated with

Rating

Micro-actuation apparatus for head ABS planarity (PTR)... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Micro-actuation apparatus for head ABS planarity (PTR)..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Micro-actuation apparatus for head ABS planarity (PTR)... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3492875