Semiconductor structures using a group III-nitride material...

Active solid-state devices (e.g. – transistors – solid-state diode – Thin active physical layer which is – Heterojunction

Reexamination Certificate

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C257S013000, C257S022000, C257S096000, C257S103000

Reexamination Certificate

active

06903364

ABSTRACT:
Group III-nitride quaternary and pentenary material systems and methods are disclosed for use in semiconductor structures, including laser diodes, transistors, and photodetectors, which reduce or eliminate phase separation and provide increased emission efficiency. In an exemplary embodiment the semiconductor structure includes a first ternary, quaternary or pentenary material layer using BlnGaAlN material system of a first conduction type formed substantially without phase separation, and a quaternary or pentenary material active layer using BlnGaAlN material system substantially without phase separation, and a third ternary, quaternary or pentenary material layer using BlnGaAlN material system of an opposite conduction type formed substantially without phase separation.

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patent: 6229150 (2001-05-01), Takayama et al.
patent: 6521917 (2003-02-01), Takayama et al.
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patent: WO 00/59084 (2000-10-01), None
Kawanishi, H. et al., “(BA1Ga)N Quaternarty System and Epitaxial Growth on (0001) 6H-SiC Substrate By Low-Pressure MO-VPE”, Dept. of Electronic Engineering, Kohgakuin University, Tokyo Japan (no date).
Edgar, J.H., “Unsable Composition Region in the Wurtzite B1-x-yGzxA1yN System”, Journal of Crystal Growth, 208, Jan. 2000, pp. 179-182.
Piner, E.L. et al., “Growth and Properties of InGaN and AllnGaN Thin Films on (0001) Sapphire”, MRS Internet Journal, vol. 1, Article 43, Dec. 17, 1996.
Matsuoka, T., “Phase Separation in Wurtzite In 1-x-yBaxA1yN”, MRS Internet Journal, Nitride Semiconductor Research, Dec. 4, 1998.

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