Method and apparatus for alignment of carriers, carrier...

Details Method and apparatus for alignment of carriers, carrier... Method and apparatus for alignment of carriers, carrier...

2005-02-08

2005-02-08

Hong, John C. (Department: 3726)

Metal working

Method of mechanical manufacture

Assembling or joining

C029S466000, C029S468000, C029S712000, C029S281500

Reexamination Certificate

active

06851170

ABSTRACT:
A carrier alignment tool system in accordance with a preferred embodiment of the present invention provides a tool and method of using the tool, which emulates the door of a substrate carrier having a removable door. The tool permits the alignment between a door opener mechanism and the load-port or other handler, on which a carrier is to be supported to be tested and corrected, until proper alignment is achieved prior to beginning substrate processing.

REFERENCES:
patent: 6216874 (2001-04-01), Bores et al.
patent: 6300644 (2001-10-01), Beckhart et al.
patent: 6307211 (2001-10-01), Beckhart et al.
SEMI E15-0698, Specification for Tool Load Port; © SEMI 1990, 1998; 8 pp.
SEMI E15.1-0600, Specification for 300mm Tool Load Port, © SEMI 1996, 2000; 11 pp.
SEMI E47-95, Specification for 150mm/200mm Pod Handles, © SEMI 1995, 2000; 4 pp.
SEMI E47.1-0200, Provisional Mechanical Specification for Boxes and Pods Used to Transport and Store 300mm Wafers, © SEMI 1997, 2000; 18 pp.
SEMI E47.1-0699, Provisional Mechanical Specification for Boxes and Pods Used to Transport and Store 300mm Wafers, © SEMI 1997, 1999; 18 pp.
SEMI E62-0299, Provisional Specification for 300mm Front-Opening Interface Mechanical Standard (FIMS), © SEMI 1997, 1999; 10 pp.
SEMI E62-0999, Provisional Specification for 300mm Front-Opening Interface Mechanical Standard (FIMS), © SEMI 1997, 1999; 9 pp.

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