Device for deposition with chamber cleaner and method for...

Details Device for deposition with chamber cleaner and method for... Device for deposition with chamber cleaner and method for...

2005-08-02

2005-08-02

Lund, Jeffrie R. (Department: 1763)

Coating apparatus

Gas or vapor deposition

With treating means

C118S715000, C156S345370

Reexamination Certificate

active

06923869

ABSTRACT:
A chamber cleaner includes a cleaner, which is sealed, a connector passing through a side of the cleaner, lamp assembly connected to the connector and uniformly arranged in an inside surface of the cleaner, a heat-source assembled in the lamp assembly and an exhausting unit having an entrance passing through a portion of the outside of the connector exposed to the cleaner, and an exit passing through a portion of the inside of the connector, which is extended to the outside of the exposed portion or a predetermined length.

REFERENCES:
patent: 3862397 (1975-01-01), Anderson et al.
patent: 4657616 (1987-04-01), Benzing et al.
patent: 5303671 (1994-04-01), Kondo et al.
patent: 6190458 (2001-02-01), Harada
patent: 6287984 (2001-09-01), Horie
patent: 6442867 (2002-09-01), Pressnall et al.
patent: 6533902 (2003-03-01), Miki et al.
patent: 2003/0098039 (2003-05-01), Cheong

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