Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Reexamination Certificate
2005-12-13
2005-12-13
Huynh, Kim (Department: 2836)
Electricity: electrical systems and devices
Electric charge generating or conducting means
Use of forces of electric charge or field
C323S312000, C279S128000
Reexamination Certificate
active
06975497
ABSTRACT:
A method for reducing particles from an electrostatic chuck, having the steps of: setting a wafer onto an attracting face of an electrostatic chuck, attracting the wafer onto the attracting face by applying a voltage to the electrostatic chuck, releasing stress due to a difference in heat expansion between the wafer and the electrostatic chuck by sliding the wafer relative to the attracting face before the wafer's temperature arrives at a saturated temperature, and increasing the wafer's temperature to a saturated temperature from its lower temperature than that of the attracting face.
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Nagao Mie
Ohno Masashi
Ushikoshi Ryusuke
Huynh Kim
NGK Insulators Ltd.
Parkhurst & Wendel L.L.P.
Rios Roberto J.
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