Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Reexamination Certificate
2005-02-01
2005-02-01
Schilling, Richard L. (Department: 1752)
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Radiation sensitive composition or product or process of making
C430S325000, C430S326000, C430S914000, C430S921000, C430S922000, C549S009000, C549S010000, C549S013000, C549S014000, C549S080000, C568S038000, C568S058000, C568S059000
Reexamination Certificate
active
06849384
ABSTRACT:
Photoacid generators comprising sulfonium salt compounds represented by the following general formula (2) wherein R1and R2represent each an alkyl group optionally having oxo, or R1and R2may be cyclized together to form an alkylene group optionally having oxo; R3, R4and R5represent each hydrogen or a linear, branched, monocyclic, polycyclic or crosslinked cyclic alkyl group; and Y−represents a counter ion.
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Hasegawa Etsuo
Iwasa Shigeyuki
Maeda Katsumi
Nakano Kaichiro
McGinn & Gibb PLLC
NEC Corporation
Schilling Richard L.
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